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Investigation of Surface Morphology for Nylon 4,6 Thin Film by Molecular Layer Deposition

제목
Investigation of Surface Morphology for Nylon 4,6 Thin Film by Molecular Layer Deposition
저자
성명모
발행일
2012-02-10
학회명
제42회 한국진공학회
개최지
보광휘닉스파크

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