상세 보기
Improvement of ion density and uniformity in two zone CCP at high frequency
- 제목
- Improvement of ion density and uniformity in two zone CCP at high frequency
- 저자
- 정진욱
- 발행일
- 2025-06-10
- 학회명
- 4th International Symposium on the Physics of Semiconductors and Applications
- 개최지
- DDC(Daejeon Convention Center)