상세 보기
Effect of Antenna Size on the E to H Heating Mode Transition in Inductively Coupled Plasma
- 제목
- Effect of Antenna Size on the E to H Heating Mode Transition in Inductively Coupled Plasma
- 저자
- 정진욱
- 발행일
- 2013-08-25
- 학회명
- 9th Asian-European International Conference On Plasma Surface Engineering
- 개최지
- Jeju Island