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Electron Beam Energy Control Using multi-DC Grid in Ar/CF4 Inductively Coupled Plasma
- 제목
- Electron Beam Energy Control Using multi-DC Grid in Ar/CF4 Inductively Coupled Plasma
- 저자
- 정진욱
- 발행일
- 2023-03-06
- 학회명
- 16th international conference on plasma nano technoligy & science
- 개최지
- gifu university(japan)