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Experimental Measurement of the total energy losses in a low pressure inductively coupled argon plasma
- 제목
- Experimental Measurement of the total energy losses in a low pressure inductively coupled argon plasma
- 저자
- 정진욱
- 발행일
- 2008-10-13
- 학회명
- 61th Gaseous Electronics Conference
- 개최지
- 달라스,미국