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Measurement of the electron energy distribution in magnetized solenoidal inductively coupled plasma
- 제목
- Measurement of the electron energy distribution in magnetized solenoidal inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2011-11-15
- 학회명
- 64th Annual Gaseous Electronics Conference
- 개최지
- Salt Lake City, Utah