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Effect of cryogenic substrate temperature in RF-biased inductive discharge
- 제목
- Effect of cryogenic substrate temperature in RF-biased inductive discharge
- 저자
- 정진욱
- 발행일
- 2025-06-11
- 학회명
- 4th International Symposium on the Physics of Semiconductors and Applications
- 개최지
- DDC(Daejeon Convention Center)