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Study of plasma parameters of low global warming potential gases and characteristics of silicon oxide etch in inductively coupled plasma
- 제목
- Study of plasma parameters of low global warming potential gases and characteristics of silicon oxide etch in inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2015-10-28
- 학회명
- 14th International Union of Materials Research Societies-International Conference on Advanced Materials
- 개최지
- Jeju, Korea