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Spatial plasma potentials and electron energy distributions in inductively and capacitively coupled plasmas under a weakly collisional and nonlocal electron kinetic regime
- 제목
- Spatial plasma potentials and electron energy distributions in inductively and capacitively coupled plasmas under a weakly collisional and nonlocal electron kinetic regime
- 저자
- 정진욱
- 발행일
- 2012-10-22
- 학회명
- 65th Gaseous Electronics Conference
- 개최지
- Austin