상세 보기
Synergistic effect of dual power on plasma density by shift of power absorption region in inductively coupled plasma
- 제목
- Synergistic effect of dual power on plasma density by shift of power absorption region in inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2010-10-04
- 학회명
- 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas
- 개최지
- Paris, France