Electrical Characteristics of FeFET with Atomic Layer Deposited HZO Thin Film and IGO Channel for Flash Memory Application

제목
Electrical Characteristics of FeFET with Atomic Layer Deposited HZO Thin Film and IGO Channel for Flash Memory Application
저자
최창환
발행일
2023-09-20
학회명
European Materials Research Society (E-MRS) Fall Meeting
개최지
University of Technology (Warsaw, Poland)