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Effect of Radio Frequency Bias on the Plasma Density and Electron Heating in Inductive Discharge
- 제목
- Effect of Radio Frequency Bias on the Plasma Density and Electron Heating in Inductive Discharge
- 저자
- 정진욱
- 발행일
- 2013-09-30
- 학회명
- 66th Gaseous Electronics Conference