상세 보기
In situ feedback control of ion flux by using a floating harmonic method in processing plasmas
- 제목
- In situ feedback control of ion flux by using a floating harmonic method in processing plasmas
- 저자
- 정진욱
- 발행일
- 2010-10-04
- 학회명
- 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas
- 개최지
- Pairs, France