Effect of Complex Permeability of the Ferrite Material to the Plasma Discharge in a Large Size Ferrite Inductively Coupled Plasma

제목
Effect of Complex Permeability of the Ferrite Material to the Plasma Discharge in a Large Size Ferrite Inductively Coupled Plasma
저자
정진욱
발행일
2015-03-28
학회명
7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
개최지
Nagoya University, Nagoya, Japan