Experimental Observation of Electron Density Increase below a DC-biased Grid in a Weakly Magnetized Inductively Coupled Plasma

제목
Experimental Observation of Electron Density Increase below a DC-biased Grid in a Weakly Magnetized Inductively Coupled Plasma
저자
정진욱
발행일
2025-10-17
학회명
78th Gaseous Electronics Conference (2025 GEC)
개최지
COEX Convention & Exhibition Center, Seoul, Republic of Korea