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Atomic-Layer Deposited Tantalum-based Metal Gates (TaN, TaAlC, TaAlN, TaCoN) for Multiple VTH Modulation
- 제목
- Atomic-Layer Deposited Tantalum-based Metal Gates (TaN, TaAlC, TaAlN, TaCoN) for Multiple VTH Modulation
- 저자
- 최창환
- 발행일
- 2022-09-29
- 학회명
- Solid State Devices and Materials (SSDM)
- 개최지
- Chiba, Japan