상세 보기
Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
- Oh, Seung-Ju;
- Lee, Hyo-Chang;
- Chung, Chin-Wook
Citations
WEB OF SCIENCE
2Citations
SCOPUS
2초록
In this paper, numerical calculations of the surface coil current and the spatial electric field in the vicinity of the antenna were investigated using wireless power transfer method. It is observed that the wirelessly transferred power to a resonant coil is dramatically changed with a variation of the excitation frequency. This result indicates that the spatial plasma distribution can be controlled through wireless resonance power transfer. This method could be applied to the large-area plasma source.
키워드
Inductively coupled plasma (ICP); spatial plasma distribution; wireless power transfer; Electric fields; Inductively coupled plasma; Numerical methods; Inductive power transmission; Excitation frequency; Inductively coupled plasma (ICP); Large-area plasma; Numerical calculation; Plasma distribution; Power deposition; Power transfers; Wireless power transfer
- 제목
- Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
- 저자
- Oh, Seung-Ju; Lee, Hyo-Chang; Chung, Chin-Wook
- 발행일
- 2015-08
- 유형
- Article
- 권
- 43
- 호
- 8
- 페이지
- 2766 ~ 2767