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Modulation of Flatband Voltage (VFB) and Equivalent Oxide Thickness (EOT) Controlled by Oxygen and Thickness in HfO2/TiN Gate Stack
- 제목
- Modulation of Flatband Voltage (VFB) and Equivalent Oxide Thickness (EOT) Controlled by Oxygen and Thickness in HfO2/TiN Gate Stack
- 저자
- 최창환
- 발행일
- 2015-11-17
- 학회명
- TACT International Thin Film Conference
- 개최지
- Tainan, Taiwan