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Reduction of Plasma-Induced Damage via Ultra-Low Electron Temperature Plasma in Gate-All-Around FET Fabrication
- 제목
- Reduction of Plasma-Induced Damage via Ultra-Low Electron Temperature Plasma in Gate-All-Around FET Fabrication
- 저자
- 정진욱
- 발행일
- 2025-09-25
- 학회명
- AVS 71st International Symposium & Exhibition
- 개최지
- Charlotte Convention Center, Charlotte, North Carolina, USA