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Studies on the spatial and temporal behaviors of the elctron energy distribution and plasma parameters in inductively and/or capacitively coupled plasma
- 제목
- Studies on the spatial and temporal behaviors of the elctron energy distribution and plasma parameters in inductively and/or capacitively coupled plasma
- 저자
- 정진욱
- 발행일
- 2011-07-06
- 학회명
- the third international conference on microelectronics and plasma technology
- 개최지
- dalian, china