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Antenna impedance tuning for enhanced power transfer and plasma density using a Faraday shield in inductively coupled plasma
- 제목
- Antenna impedance tuning for enhanced power transfer and plasma density using a Faraday shield in inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2026-03-03
- 학회명
- ISPlasma 2026
- 개최지
- Nagoya Congress Center, 1-1 Atsuta Nishimachi, Atsuta-ku, Nagoya, Aichi 456-0036, Japan