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Improved Al2O3 Dielectric Properties using Remote Plasma Atomic Layer Deposition with Negative-Biased Pulse-Mode Direct Current (DC) Power
- 제목
- Improved Al2O3 Dielectric Properties using Remote Plasma Atomic Layer Deposition with Negative-Biased Pulse-Mode Direct Current (DC) Power
- 저자
- 최창환
- 발행일
- 2011-07-06
- 학회명
- The Third International Conference on Microelectronics and Plasma Technology
- 개최지
- Dalian (대련), China (중국)