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Real-time measurement of dielectric thickness on a millimeter scale using triple-frequency in inductively coupled plasma
- 제목
- Real-time measurement of dielectric thickness on a millimeter scale using triple-frequency in inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2021-10-07
- 학회명
- 74th Annual Gaseous Electronics Conference
- 개최지
- Virtual