Heterogeneous Monolithic 3D Integration for Hybrid Vertical Inverter using n-type IGTO TFT on p-type Si TFT

제목
Heterogeneous Monolithic 3D Integration for Hybrid Vertical Inverter using n-type IGTO TFT on p-type Si TFT
저자
최창환
발행일
2023-11-20
학회명
Korea International Semiconductor Conference on Manufacturing Tehcnology (KISM)
개최지
Paradise Hotel Busan