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Dependence of Metal Gate Thickness and Composition on VFB Modulation in MOS Devices
- 제목
- Dependence of Metal Gate Thickness and Composition on VFB Modulation in MOS Devices
- 저자
- 최창환
- 발행일
- 2012-03-18
- 학회명
- China Semiconductor Technology International Conference (CSTIC)
- 개최지
- Shanghai, China