상세 보기
Experimantal observation of hysteresis in a neon inductively coupled plasma at low pressure
- 제목
- Experimantal observation of hysteresis in a neon inductively coupled plasma at low pressure
- 저자
- 정진욱
- 발행일
- 2022-04-28
- 학회명
- plasma processing and technology international conference
- 개최지
- 스페인 바르셀로나