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Investigation of Plasma Potential in Dual-Frequency (2, 27.12 MHz) Inductively Coupled Plasma Using a Circuit Mode
- 제목
- Investigation of Plasma Potential in Dual-Frequency (2, 27.12 MHz) Inductively Coupled Plasma Using a Circuit Mode
- 저자
- 정진욱
- 발행일
- 2025-06-12
- 학회명
- 4th International Symposium on the Physics of Semiconductors and Applications
- 개최지
- DDC(Daejeon Convention Center)