Improved Electrical Characteristics of FD-SOI Tunneling FET (TFET) Processed with Direct and Remote Interfacial Layer Scavenging Approaches

제목
Improved Electrical Characteristics of FD-SOI Tunneling FET (TFET) Processed with Direct and Remote Interfacial Layer Scavenging Approaches
저자
최창환
발행일
2016-02-24
학회명
한국반도체학술대회
개최지
하이원리조트, 강원도