상세 보기
Effect of Plasma Heat flux on Cryogenic Substrate Temperature in an Inductive Discharge with RF bias power
- 제목
- Effect of Plasma Heat flux on Cryogenic Substrate Temperature in an Inductive Discharge with RF bias power
- 저자
- 정진욱
- 발행일
- 2024-10-01
- 학회명
- 77th Gaseous Electronics Conference (2024 GEC)
- 개최지
- Double Tree by Hilton San Diego Mission Valley, San Diego, California.