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The effect of C(60) cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films
- Shon, Hyun Kyong;
- Lee, Tae Geol;
- Kim, Dahl Hyun;
- Kang, Hee Jae;
- Lee, Byoung Hoon;
- ... Sung, Myung Mo;
- 외 1명
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1초록
The effects of C(60) cluster ion beam bombardment in sputter depth pro. ling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs(+), 10 keV C(60)(+), 20 keV C(60)(2+) and 30 keV C(60)(3+) was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth.
키워드
ToF-SIMS; Inorganic-organic multiple nm thin films; C(60) cluster ion bombardment; SYSTEMS
- 제목
- The effect of C(60) cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films
- 저자
- Shon, Hyun Kyong; Lee, Tae Geol; Kim, Dahl Hyun; Kang, Hee Jae; Lee, Byoung Hoon; Sung, Myung Mo; Moon, Dae Won
- 발행일
- 2008-12
- 유형
- Article; Proceedings Paper
- 권
- 255
- 호
- 4
- 페이지
- 1055 ~ 1057