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Spatial distribution of floating potential at wafer level in electronegative plasma
- 제목
- Spatial distribution of floating potential at wafer level in electronegative plasma
- 저자
- 정진욱
- 발행일
- 2016-03-09
- 학회명
- ISPlasma2016/IC-PLANTS2017
- 개최지
- Nagoya University, Nagoya, Japan