Fabrication of ZnO Nanorods by Using Atomic Layer Deposition

초록

We have been studied the fabrication of ZnO nanorods by using atomic layer deposition (ALD) with a anodic aluminum oxide (AAO) as the template. Anodic aluminum oxide template made by 0.3M oxalic acid and ZnO nanorods fabricated inside AAO template by using ALD with Diethyl Zinc (DEZn) and water at 413K. The ZnO nanorods have been investigated by scanning electron microscopy (SEM) and X-ray Diffraction (XRD).