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Simple in situ method for real time mearsurment of dielectric film thickness in plasma
- 제목
- Simple in situ method for real time mearsurment of dielectric film thickness in plasma
- 저자
- 정진욱
- 발행일
- 2009-10-20
- 학회명
- 62th Gaseous Electronics Conference
- 개최지
- saratoga springs, NY U.S.A