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Investigation of the ow rate eect on the plasma parameters by using miniaturized plasma diagnostic device in the remote plasma.
- 제목
- Investigation of the ow rate eect on the plasma parameters by using miniaturized plasma diagnostic device in the remote plasma.
- 저자
- 정진욱
- 발행일
- 2017-11-07
- 학회명
- 70th Annual Gaseous Electronics Conference
- 개최지
- Pittsburgh, Pennsylvania