Surface modifications of organic-inorganic hybrid film on PDMS stamp for imprinting lithography using Molecular Layer Deposition

초록

Molecular Layer Deposition(MLD) has been utilized for the surface engineering. We chose the surface modification of Al2O3 and 1H, 1H, 2H, 2H - perfluorooctyltrichlorosilane(FTS) as an example to demonstrate the concept of MLD-based approach. The Samples were characterized by Contact Angle Analysis(CAA), Scanning Electron Microscopy(SEM), X-Ray Photoelectron Spectroscopy(XPS), Atomic Force Microscopy(AFM) and stamping test of surface modificated PDMS stamp using MLD. The results show that surface modificated PDMS stamp has better properties than PDMS stamp which not surface modificated.