Improved Electrical Chararcteristics of Gate-Last FD-SOI TFETs with All ALD High-K/Metal Gate Stack Using D2 Passivation

제목
Improved Electrical Chararcteristics of Gate-Last FD-SOI TFETs with All ALD High-K/Metal Gate Stack Using D2 Passivation
저자
최창환
발행일
2017-04-03
학회명
International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
개최지
아테네/그리스