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Improved Electrical Chararcteristics of Gate-Last FD-SOI TFETs with All ALD High-K/Metal Gate Stack Using D2 Passivation
- 제목
- Improved Electrical Chararcteristics of Gate-Last FD-SOI TFETs with All ALD High-K/Metal Gate Stack Using D2 Passivation
- 저자
- 최창환
- 발행일
- 2017-04-03
- 학회명
- International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
- 개최지
- 아테네/그리스