Heterogeneous Inverter Using N-type IGTO TFT Prepared by Atomic-layer Deposition with Various Channel Compositions on the P-type Si FET

제목
Heterogeneous Inverter Using N-type IGTO TFT Prepared by Atomic-layer Deposition with Various Channel Compositions on the P-type Si FET
저자
최창환
발행일
2024-01-25
학회명
31회 한국반도체학술대회 (KCS)
개최지
경주화백컨벤션센터