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Controllability of Workfunction and EOT Scaling with High-K/Metal Gate for Gate-First CMOS Applications
- 제목
- Controllability of Workfunction and EOT Scaling with High-K/Metal Gate for Gate-First CMOS Applications
- 저자
- 최창환
- 발행일
- 2010-08-23
- 학회명
- IUMRS-ICEM 2010
- 개최지
- Seoul KINTEX, KOREA