Gate Metal Engineering for Tailoring Ferroelectric Properties of Hf(x)Zr(1-x)O2 Thin Films

제목
Gate Metal Engineering for Tailoring Ferroelectric Properties of Hf(x)Zr(1-x)O2 Thin Films
저자
최창환
발행일
2025-11-11
학회명
Korea International Semiconductor Conference on Manufacturing Technology (KISM)
개최지
Paradise Hotel Busan