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Gate Metal Engineering for Tailoring Ferroelectric Properties of Hf(x)Zr(1-x)O2 Thin Films
- 제목
- Gate Metal Engineering for Tailoring Ferroelectric Properties of Hf(x)Zr(1-x)O2 Thin Films
- 저자
- 최창환
- 발행일
- 2025-11-11
- 학회명
- Korea International Semiconductor Conference on Manufacturing Technology (KISM)
- 개최지
- Paradise Hotel Busan