Characterization of High Pressure Hydrogen Annealing Effect on Polysilicon Channel Field Effect Transistors using Isothermal Deep Level Trap Spectroscopy

제목
Characterization of High Pressure Hydrogen Annealing Effect on Polysilicon Channel Field Effect Transistors using Isothermal Deep Level Trap Spectroscopy
저자
최창환
발행일
2016-06-28
학회명
IEEE International Conference on IC Design and Technology (ICICDT)
개최지
Ho Chi Minh City, Vietnam