Effects of Composition and Thickness of TiN Metal Gate on the Equivalent Oxide Thickness and Flat-Band Voltage in Metal Oxide Semiconductor Devices

제목
Effects of Composition and Thickness of TiN Metal Gate on the Equivalent Oxide Thickness and Flat-Band Voltage in Metal Oxide Semiconductor Devices
저자
최창환
발행일
2013-06-26
학회명
INFOS
개최지
Cracow, Poland