RF-Magnetron Sputtered Chalcopyrite Cu2ZnSnS4 Thin Film Using Single Quaternary Sputtering Target Prepared by Sintering Process

제목
RF-Magnetron Sputtered Chalcopyrite Cu2ZnSnS4 Thin Film Using Single Quaternary Sputtering Target Prepared by Sintering Process
저자
최창환
발행일
2012-07-05
학회명
The Fourth International Conference on Microelectronics and Plasma Technology (ICMAP)
개최지
Jeju, Korea