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The Impacts of PEALD TiN Process on The Effective Work-Function in the HKMG Devices
- 제목
- The Impacts of PEALD TiN Process on The Effective Work-Function in the HKMG Devices
- 저자
- 최창환
- 발행일
- 2016-01-20
- 학회명
- International Symposium on Fusion Tech 2016
- 개최지
- Harbin, China