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The effect of cryogenic substrate cooling on electron energy distribution in inductively coupled plasma
- 제목
- The effect of cryogenic substrate cooling on electron energy distribution in inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2025-10-14
- 학회명
- 78th Gaseous Electronics Conference (2025 GEC)
- 개최지
- COEX Convention & Exhibition Center, Seoul, Republic of Korea