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Fabrication of Organic-Inorganic Hybrid Thin Film by Molecular Layer Deposition

제목
Fabrication of Organic-Inorganic Hybrid Thin Film by Molecular Layer Deposition
저자
성명모
발행일
2010-08-20
학회명
제39회 정기하계학술대회(한국진공학회)
개최지
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