Fabrication of ZnO/ZrO2 Nanocables by Using Atomic Layer Deposition

초록

We have been studied the fabrication of ZnO/ZrO2 nanocables by using atomic layer deposition (ALD) with a nanoporous polycarbonate (PC) membrane as the template. ZrO2 nanotubes were formed by ALD coating of nanoporous membrane by using microcontact printed OTS-SAMs as the passivation layers. ZrO2 nanotubes deposited with Zirconium tert-butoxide and water. ZnO deposited with Diethyl Zinc (DEZn) and water inside ZrO2 nanotubes. The ZnO/ZrO2 nanocables have been investigated by scanning electron microscopy (SEM) and Transmission electron microscopy (TEM).