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Experimental Observation of plasma parameter and photoresist ashing in an inductively coupled plasma sources with MRWPT antenna
- 제목
- Experimental Observation of plasma parameter and photoresist ashing in an inductively coupled plasma sources with MRWPT antenna
- 저자
- 정진욱
- 발행일
- 2022-04-28
- 학회명
- plasma processing and technology international conference
- 개최지
- 스페인 바로셀로나