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Modulating Electron Energy Probability Functions with 2 MHz Power in Dual-Frequency (2/27.12 MHz) Inductively Coupled Plasma : Effects of Oxygen/Argon Discharges at Low Pressure
- 제목
- Modulating Electron Energy Probability Functions with 2 MHz Power in Dual-Frequency (2/27.12 MHz) Inductively Coupled Plasma : Effects of Oxygen/Argon Discharges at Low Pressure
- 저자
- 정진욱
- 발행일
- 2024-06-25
- 학회명
- 3rd International Fusion And Plasma Conference
- 개최지
- Seoul Olympic Parktel, Seoul, Korea