Self-assembled monolayers, SAMs

자기조립 단분자막
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초록

Self-assembled monolayers (SAMs) are thin organic films which form spontaneously on solid surfaces. They have been shown to be useful as passivating layers and also for the modification of surface properties. Potential applications include wetting, adhesion, friction, chemical sensing, ultrafine scale lithography, and protection of metals against corrosion. Among these techniques for generating patterned SAMs, microcontact printing is the most practical because it is simple and rugged. This technique has been used to produce substrates for several different applications. Atomic layer deposition (ALD) is a gas-phase thin film deposition method using self-terminating surface reactions. ALD process is very sensitive to the surface conditions of the substrates, it offers an ideal method for selective deposition of thin films on patterned SAMs.

키워드

self-assembled monolayersmicocontact printingatomic layer depositionATOMIC LAYER DEPOSITIONALKYLSILOXANE MONOLAYERSSILICON SURFACESTHERMAL-BEHAVIORALKYL MONOLAYERSTITANIUM-OXIDEGOLDADSORPTIONALKANETHIOLS
제목
Self-assembled monolayers, SAMs
제목 (타언어)
자기조립 단분자막
저자
Sung, Myung Mo
발행일
2007-09
유형
Article
저널명
Electronic Materials Letters
3
3
페이지
137 ~ 145