박진성 프로필 사진

박진성

Park, Jinseong

신소재공학부

공과대학

Web Of Science Scopus ORCID

연구분야

  • 정보전자소재 및 소자/나노박막 공정

자료 필터

자료유형

발행연도

2011 ~ 2027
2011 2027

키워드

언어

전체 521건 중 1번부터 10번까지의 결과를 표시합니다.

2027
Article

Surface ligand engineering for defect-suppressed TiO2 dielectrics by functional precursor-assisted ozone ALD

  • Kim, Min Chan ; 
  • Yang, Hae Lin ; 
  • Shin, Seong A. ; 
  • Lee, Hyeseong ; 
  • Park, Ji-Yeon ; 
  • ... Park, Jin-Seong ; 
  • 외 3명
  • 2027-01
  • Applied Surface Science
  • ELSEVIER
2026
Article

Physically driven coupling of defect activation and structural rearrangement in low-temperature In2O3 films via in-cycle Ar plasma

  • 2026-09
  • Journal of Materials Chemistry C
  • ROYAL SOC CHEMISTRY
Article

Structure-Dependent Ferroelectric Enhancement in Hf0.5Zr0.5O2 Thin Films under High-Pressure Post-Deposition Annealing

  • Beom, Jun Young ; 
  • Oh, Hye-Jin ; 
  • Lim, Seokwon ; 
  • Hwang, Taewon ; 
  • Park, Chang-Kyun ; 
  • ... Park, Jin-Seong
  • 2026-08
  • ACS Applied Electronic Materials
  • American Chemical Society
Article

Atomic layer processing for Ångström-scale precision in 3D-integrated semiconductor manufacturing

  • Yang, Hae Lin ; 
  • Kim, Min Chan ; 
  • Park, Gi-Beom ; 
  • Park, Ji-Yeon ; 
  • Park, Hyein ; 
  • ... Ahn, Jinho ; 
  • ... Park, Jin-Seong ; 
  • 외 1명
  • 2026-08
  • International Journal of Extreme Manufacturing
  • IOP Publishing
Article

Decoupling Moisture and Hydrogen Barrier Properties in Silicon Nitride Films Deposited by Plasma-Enhanced Atomic Layer Deposition at 100 °C via Precursor-Defined Bonding Networks

  • Kim, Ji Min ; 
  • Kim, Tae-Kyung ; 
  • Oh, Hye-Jin ; 
  • Oh, Min Ho ; 
  • Baek, Ji-Ho ; 
  • ... Park, Jin-Seong ; 
  • 외 4명
  • 2026-07
  • ACS Applied Materials & Interfaces
  • AMER CHEMICAL SOC
Article

Hydrogen-State-Engineered Oxide Semiconductor Channels Enabling Reliable 2T0C DRAM Operation

  • Lee, Jun-Yeoub ; 
  • Hwang, Taewon ; 
  • Choi, Su-Hwan ; 
  • Oh, Hye-Jin ; 
  • Park, Chang-Kyun ; 
  • ... Park, Jin-Seong
  • 2026-06
  • Advanced Electronic Materials
  • WILEY-V C H VERLAG GMBH
Article

High-temperature interfacial stability of In2O3 FETs with SiO2 versus Al2O3 insulators enabling 3 nm channel scaling

  • Oh, Hye-Jin ; 
  • Lee, Jun-Yeoub ; 
  • Beom, Jun Young ; 
  • Sun, Ji Eun ; 
  • Lee, Chi-Hoon ; 
  • ... Park, Jin-Seong ; 
  • 외 7명
  • 2026-06
  • Applied Surface Science
  • ELSEVIER
Article

Nitrogen-enabled amorphous stabilization of high-mobility in-rich IGO via PEALD for uniform and reliable oxide TFTs

  • Yang, YuJin ; 
  • Kim, Sang-Hyun ; 
  • Kim, Tae Heon ; 
  • Song, Jeong-Su ; 
  • Lee, Sun Myung ; 
  • ... Park, Jin-Seong ; 
  • 외 3명
  • 2026-06
  • MATERIALS TODAY ELECTRONICS
  • ELSEVIER
Article

High-Temperature-Stable Polycrystalline ALD-InGaO Channels Enabled by Buffer-Layer Engineering

  • Kim, Dong-Gyu ; 
  • Oh, Hye-Jin ; 
  • Cho, Tae Woong ; 
  • Kwag, Jae-Hyeok ; 
  • Hur, Jaeseok ; 
  • ... Park, Jin-Seong ; 
  • 외 2명
  • 2026-04
  • ACS APPLIED ELECTRONIC MATERIALS
  • AMER CHEMICAL SOC
Article

Engineering metal/oxide interfaces in IGZO thin-film transistors via atomic-layer-grown SiO2 interlayers for improved contact performance

  • Hwang, Taewon ; 
  • Lim, So Young ; 
  • Song, Jeong-Su ; 
  • Lee, Sangwoo ; 
  • Park, Jin-Seong
  • 2026-02
  • Applied Surface Science
  • ELSEVIER
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